Ni80Fe20 nanotubes with optimized spintronic functionalities prepared by atomic layer deposition†
Abstract
Permalloy Ni80Fe20 is one of the key magnetic materials in the field of magnonics. Its potential would be further unveiled if it could be deposited in three dimensional (3D) architectures of sizes down to the nanometer. Atomic Layer Deposition, ALD, is the technique of choice for covering arbitrary shapes with homogeneous thin films. Early successes with ferromagnetic materials include nickel and cobalt. Still, challenges in depositing ferromagnetic alloys reside in the synthesis via decomposing the constituent elements at the same temperature and homogeneously. We report plasma-enhanced ALD to prepare permalloy Ni80Fe20 thin films and nanotubes using nickelocene and iron(III) tert-butoxide as metal precursors, water as the oxidant agent and an in-cycle plasma enhanced reduction step with hydrogen. We have optimized the ALD cycle in terms of Ni : Fe atomic ratio and functional properties. We obtained a Gilbert damping of 0.013, a resistivity of 28