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MEMS - Books
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MEMS Books

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MEMS Books
This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices.
Volume 1 of the multi-volume reference, BioMEMS and Biomedical Nanotechnology, focuses on synthetic nanodevices and the synthesis of nanomaterials and the generation of nanoscale features. The nanomaterials include polymeric microspheres and nanostructures, carbon nanotubes, silicon, silicon dioxide, and iron oxide. There is also a chapter on the characterization of critical nanostructures for bio applications such as nanochannels and nanopores. The second part involves hybrid synthetic-biomolecular nanodevices that utilize the self assembly properties of both biomolecules and synthetic materials. There is a chapter discussing the structure-function relations between biomolecular (protein) and inorganic interfaces. The third part gives the theoretical underpinning of bio nanodevices covering computation methods, informatics, and mechanics. These fundamentals are critical in designing the next generation nanodevices and also understanding the interaction between nanodevices and biological systems to enable more efficient in vitro and in vivo bio applications.
Since 2004 the Springer Handbook of Nanotechnology has established itself as the definitive reference in the nanoscience and nanotechnology area. It integrates the knowledge from nanofabrication, nanodevices, nanomechanics, Nanotribology, materials science, and reliability engineering in just one volume.
This book is designed as an introduction for graduate students, engineers, and researchers who want to understand the current status and future trends of micro- and nano-electronic materials and devices. It also serves as an essential reference for nanotechnology "gurus" who need to keep abreast of the latest directions and challenges in microelectronic technology. The viewpoints presented within the book can help to foster further research and cross-disciplinary interactions required to surmount the barriers facing future generations of technology design.
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