Ellipsometers

Ellipsometry is a versatile and powerful optical technique for the investigation of the dielectric properties (complex refractive index or dielectric function) of thin films. It has applications in many different fields, from semiconductor physics to microelectronics and biology, from basic research to industrial applications. Ellipsometry is a very sensitive measurement technique and provides unequalled capabilities for thin film metrology. As an optical technique, spectroscopic ellipsometry is non-destructive and contactless.

Equipment

GES5E Spectroscopic Ellipsometer from Semilab

The GES5E is the SEMILAB SOPRA core instrument for R&D; applications. GES5E integrates advanced and well proven opto-mechanical designs coupled to high performance electronics, Spectrometers and spectrographs and user friendly Windows software. GES5E is the most recent model of 5 generations of spectroscopic ellipsometers developed by SEMILAB SOPRA.

Spectroscopic Ellipsometer - FilmTek™ 2000SE

The FilmTek™ 2000SE is a high performance spectroscopic ellipsometer for thin film characterization that measures from the deep UV to NIR (190-1700nm). Based on a rotating compensator design, the FilmTek™ 2000SE spectroscopic ellipsometer combines spectroscopic ellipsometry with multiple angle reflectometry to make it ideally suited for measuring the thickness and optical constants (n & k) of very thin films.

SOPRA GES5E for R&D; Spectroscopic Ellipsometer

The GES5E is the SOPRA core instrument for R&D; applications. GES5E integrates advanced and well proven opto-mechanical designs coupled to high performance electronics, Spectrometers and spectrographs and user friendly Windows software. GES5E is the most recent model of 5 generations of spectroscopic ellipsometers developed by SOPRA.

PT-5 Thin Film Metrology Station from Semilab

The PT-5 panel tester Gen5 is designed to measure properties of thin film solar cells that meet the GEN-5 standard. It incorporates an ellipsometer, a non-contact resistivity mapper and a haze meter.

SENTECH SENresearch Spectroscopic Ellipsometer

The SENresearch broadband spectroscopic ellipsometer family is designed to meet the requirements in modern research with special emphasis on speed and accuracy for unmatched variety of applications.

Alpha SE Spectroscopic Ellipsometer

The Alpha SE™ is the newest addition to the JA Woollam line of ellipsometers. This new ellipsometer is designed to make SE measurements as fast and simple as possible. The Alpha-SE™ will measure both thickness and index with the use of the Alpha-SE software. With the compact, fully integrated design and USB connection make the ultimate table top tool.

SENTECH SE 500adv CER Laser Ellipsometer

The SE 500adv can be operated as a laser ellipsometer, as a CER ellipsometer, or as a film thickness probe FTPadvanced. As result it offers a maximum flexibility never reached by standard laser ellipsometers.

SENTECH SENpro Spectroscopic Ellipsometer

The SENpro represents a new generation of cost effective spectroscopic ellipsometers featuring simple operation, measurement speed and combined data analysis of ellipsometric measurements at single or multiple angle of incidence.

EP Series Porosimeter Ellipsometers from Semilab

EP5, EP12 and EP20 tools from Semilab are based on Ellipsometric porosimetry (EP) having various degree of automation and wafer size capabilities. EP measures the change of the optical properties and thickness of the materials during adsorption and desorption of either an organic solvent or water at reduced pressure.

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