(Translated by https://www.hiragana.jp/)
NIST Synchrotron Ultraviolet Radiation Facility SURF III
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Synchrotron Ultraviolet Radiation Facility SURF III

Description:

The Synchrotron Ultraviolet Radiation Facility SURF III is operated by the Ultraviolet Radiation Group as a stable light source for radiometry and research. SURF covers the wavelength range from the far infrared to the soft x-ray.

  • Provides our National standards for UV and EUV radiometry
    • Monitoring space weather and solar variability
    • Advancing industrial uses – e.g. EUV microlithography, UV curing
  • Provides continuum radiation from the soft x-ray to the infrared spectral regions, with ideal output for EUV studies related to solar physics and the development of EUV lithography
  • Calculable irradiance traceable to the SI units to less than 1 % absolute uncertainty from 4 nm to 400 nm
  • Beamlines equipped for detector, spectrometer, and lamp calibrations; reflectometry and transmission measurements; degradation and lifetime studies
  • Carefully characterized and maintained source, operated in a clean hydrocarbon-free vacuum

General SURF Program Inquiries

 Thomas Lucatorto
SURF Accelerator Systems Edward Hagley
Synchrotron Radiation Applications Uwe Arp
Extreme-ultraviolet Program Thomas Lucatorto
 
Beamline 1 Extreme-ultraviolet multilayer degradation studies
Properties of extreme-ultraviolet photoresists		 Charles Tarrio, Steve Grantham, Robert Berg
Beamline 2 Absolute source-based irradiance calibrations of radiometric instrumentation Mitch Furst
Beamline 3 Center for Advanced Synchrotron Radiation-Based Metrology Thomas Lucatorto, Jack Rife, Rob Vest, Uwe Arp
Beamline 4 Ultraviolet optical properties and calibrations Ping-Shine Shaw, Uwe Arp
Beamline 5 New Beam Imaging System Uwe Arp
Beamline 6 Current monitor Edward Hagley, Alex Farrell, Mitch Furst
Beamline 6B Educational Display Charles Clark
Beamline 7 Extreme-ultraviolet optical properties and calibrations Charles Tarrio, Steve Grantham
Beamline 8 Extreme-ultraviolet multilayer endurance testing Shannon Hill, John Curry
Beamline 9 Extreme-ultraviolet detector calibrations Rob Vest
Beamline 10 Beam Imaging Uwe Arp

Specifications / Capabilities:

What is Synchrotron Radiation?

SURF Accelerator Parameters

SURF Status

SURF Beam Image

Calculate SURF Output Spectrum

Calculate SURF Vertical Angular Spread

Selected Publications
surfpanorama
Panoramic view from the west of the machine hall of the SURF III Synchrotron Ultraviolet Radiation Facility.
Contact

Name: Thomas Lucatorto
Phone: 301-975-3734
Email: thomas.lucatorto@nist.gov
Address:
100 Bureau Dr, MS 8411
Gaithersburg, MD 20899-8411


Name: Edward Hagley
Phone: 301-975-6381
Email: edward.hagley@nist.gov

Name: Mitchell Furst
Phone: 301-975-6378
Email: mitchell.furst@nist.gov

Name: Alex Farrell
Phone: 301-975-8372
Email: alex.farrell@nist.gov

Name: Uwe Arp
Phone: 301-975-3233
Email: uwe.arp@nist.gov