Computer Science > Other Computer Science
[Submitted on 7 May 2008]
Title:Mechanical Fatigue on Gold MEMS Devices: Experimental Results
View PDFAbstract: The effect of mechanical fatigue on structural performances of gold devices is investigated. The pull-in voltage of special testing micro-systems is monitored during the cyclical load application. The mechanical collapse is identified as a dramatic loss of mechanical strength of the specimen. The fatigue limit is estimated through the stair-case method by means of the pull-in voltage measurements. Measurements are performed by means of the optical interferometric technique.
Submission history
From: EDA Publishing Association [view email] [via CCSD proxy][v1] Wed, 7 May 2008 09:53:11 UTC (673 KB)
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