(Translated by https://www.hiragana.jp/)
[1608.07171] Ultra-smooth single crystal diamond surfaces resulting from implantation and lift-off processes
Skip to main content
We gratefully acknowledge support from the Simons Foundation, member institutions, and all contributors. Donate
arXiv logo
Cornell University Logo

Condensed Matter > Materials Science

arXiv:1608.07171 (cond-mat)
[Submitted on 25 Aug 2016]

Title:Ultra-smooth single crystal diamond surfaces resulting from implantation and lift-off processes

Authors:T. N. Tran Thi, B. Fernandez, D. Eon, E. Gheeraert, J. Hartwig, T. A. Lafford, A. Perrat-Mabilon, C. Peaucelle, P. Olivero, E. Bustarret
View PDF
Abstract:A method for obtaining a smooth, single crystal diamond surface is presented, whereby a sacrificial defective layer is created by implantation and graphitized by annealing before being selectively etched. We have used O+ at 240 keV, the main process variables being the ion fluence (ranging from 3x10^15 cm^-2 to 3x10^17 cm^-2) and the final etching process (wet etch, H2 plasma and annealing in air). The substrates were characterized by atomic force microscopy, optical profilometry and white beam X-ray topography. The influence of the various process parameters on the resulting lift-off efficiency and final surface roughness is discussed. An O+ fluence of 2x10^17 cm^-2 was found to result in sub-nanometre roughness over tens of um^2.
Comments: 4 pages, 4 figures
Subjects: Materials Science (cond-mat.mtrl-sci)
Cite as: arXiv:1608.07171 [cond-mat.mtrl-sci]
  (or arXiv:1608.07171v1 [cond-mat.mtrl-sci] for this version)
  https://doi.org/10.48550/arXiv.1608.07171
Journal reference: Physica Status Solidi A 208 (9), 2057-2061 (2011)
Related DOI: https://doi.org/10.1002/pssa.201100038

Submission history

From: Paolo Olivero [view email]
[v1] Thu, 25 Aug 2016 14:30:18 UTC (325 KB)
Full-text links:

Access Paper:

  • View PDF
  • Other Formats
view license
Current browse context:
cond-mat.mtrl-sci
< prev   |   next >
new | recent | 2016-08
Change to browse by:
cond-mat

References & Citations

export BibTeX citation

Bookmark

BibSonomy logo Reddit logo

Bibliographic and Citation Tools

Bibliographic Explorer (What is the Explorer?)
Litmaps (What is Litmaps?)
scite Smart Citations (What are Smart Citations?)

Code, Data and Media Associated with this Article

CatalyzeX Code Finder for Papers (What is CatalyzeX?)
DagsHub (What is DagsHub?)
Gotit.pub (What is GotitPub?)
Papers with Code (What is Papers with Code?)
ScienceCast (What is ScienceCast?)

Demos

Replicate (What is Replicate?)
Hugging Face Spaces (What is Spaces?)
TXYZ.AI (What is TXYZ.AI?)

Recommenders and Search Tools

Influence Flower (What are Influence Flowers?)
Connected Papers (What is Connected Papers?)
CORE Recommender (What is CORE?)
IArxiv Recommender (What is IArxiv?)

arXivLabs: experimental projects with community collaborators

arXivLabs is a framework that allows collaborators to develop and share new arXiv features directly on our website.

Both individuals and organizations that work with arXivLabs have embraced and accepted our values of openness, community, excellence, and user data privacy. arXiv is committed to these values and only works with partners that adhere to them.

Have an idea for a project that will add value for arXiv's community? Learn more about arXivLabs.

Which authors of this paper are endorsers? | Disable MathJax (What is MathJax?)