Physics > Applied Physics
[Submitted on 4 Oct 2019]
Title:A Silicon MEMS EM vibration energy harvester
View PDFAbstract:This paper presents an optimized silicon-MEMS electromagnetic vibration energy harvester suitable for applications such as machine health monitoring. The harvester comprises a DRIE-etched silicon suspension, and pick-and-place N42 NdBFe magnets and copper coils, housed in a 3D-printed package. The harvester is designed to operate near 50Hz with 0.5-1 g vibrations using a long-stroke suspension. Multi-domain harvester optimization results in an open-circuit voltage of 1.7 V, a matched-load power output of 2.2 mW, and a matched-load power-output density of 1.23 mW/cm3 at 1.1 g with a resonance frequency of 76.3Hz .
Submission history
From: Ujwal Radhakrishna [view email][v1] Fri, 4 Oct 2019 20:10:35 UTC (8,706 KB)
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