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[2204.10569] Comparison of different sensor thicknesses and substrate materials for the monolithic small collection-electrode technology demonstrator CLICTD
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Physics > Instrumentation and Detectors

arXiv:2204.10569 (physics)
[Submitted on 22 Apr 2022 (v1), last revised 30 Aug 2022 (this version, v2)]

Title:Comparison of different sensor thicknesses and substrate materials for the monolithic small collection-electrode technology demonstrator CLICTD

Authors:Katharina Dort, Rafael Ballabriga, Justus Braach, Eric Buschmann, Michael Campbell, Dominik Dannheim, Lennart Huth, Iraklis Kremastiotis, Jens Kröger, Lucie Linssen, Magdalena Munker, Walter Snoeys, Simon Spannagel, Peter Švihra, Tomas Vanat
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Abstract:Small collection-electrode monolithic CMOS sensors profit from a high signal-to-noise ratio and a small power consumption, but have a limited active sensor volume due to the fabrication process based on thin high-resistivity epitaxial layers. In this paper, the active sensor depth is investigated in the monolithic small collection-electrode technology demonstrator CLICTD. Charged particle beams are used to study the charge-collection properties and the performance of devices with different thicknesses both for perpendicular and inclined particle incidence. In CMOS sensors with a high-resistivity Czochralski substrate, the depth of the sensitive volume is found to increase by a factor two in comparison with standard epitaxial material and leads to significant improvements in the hit-detection efficiency and the spatial and time resolution.
Subjects: Instrumentation and Detectors (physics.ins-det)
Cite as: arXiv:2204.10569 [physics.ins-det]
  (or arXiv:2204.10569v2 [physics.ins-det] for this version)
  https://doi.org/10.48550/arXiv.2204.10569
Related DOI: https://doi.org/10.1016/j.nima.2022.167413

Submission history

From: Katharina Dort [view email]
[v1] Fri, 22 Apr 2022 08:36:57 UTC (17,575 KB)
[v2] Tue, 30 Aug 2022 20:10:59 UTC (1,141 KB)
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