(Translated by https://www.hiragana.jp/)
1 INTRODUCTION

Numerical modeling of SNSPD absorption utilizing optical conductivity with quantum corrections

M. Baránek1, P. Neilinger1,2, S. Kern1, and M. Grajcar1,2
1 Department of Experimental Physics, Comenius University, SK-842 48, Bratislava, Slovakia
2 Institute of Physics, Slovak Academy of Sciences, Dúbravská cesta 9, SK-845 11, Bratislava, Slovakia

ABSTRACT. Superconducting nanowire single-photon detectors are widely used in various fields of physics and technology, due to their high efficiency and timing precision. Although, in principle, their detection mechanism offers broadband operation, their wavelength range has to be optimized by the optical cavity parameters for a specific task. We present a study of the optical absorption of a superconducting nanowire single photon detector (SNSPD) with an optical cavity. The optical properties of the niobium nitride films, measured by spectroscopic ellipsometry, were modelled using the Drude-Lorentz model with quantum corrections. The numerical simulations of the optical response of the detectors show that the wavelength range of the detector is not solely determined by its geometry, but the optical conductivity of the disordered thin metallic films contributes considerably. This contribution can be conveniently expressed by the ratio of imaginary and real parts of the optical conductivity. This knowledge can be utilized in detector design.

1 INTRODUCTION

Strengthening the security of digital communication channels by building Quantum Key Distribution (QKD) infrastructure is an ongoing effort worldwide[1, 2]. Most QKD systems are based on entangled photon pairs as quantum bits and utilize the existing, low-loss fiber optical infrastructure [3]. To implement an efficient algorithm, a single-photon detector with a high overall detection efficiency, low dark counts, and high speed is required[4]. The State-of-the-art detectors that fulfill these requirements are the superconducting nanowire single-photon detectors (SNSPD)[5]. They are superior in terms of detection efficiency and dark count rates to other types[6], such as the Avalanche Photodiodes (APD)[7], and do not require sub-kelvin temperatures, as the Transition Edge Sensors (TES)[8] do. Moreover, their superior properties make them beneficial in a broad range of applications in different areas of physics, for example, physical chemistry and spectroscopy[9], fluorescent luminescence[10], or fast space-to-ground communication[11] often requiring a lower wavelength range. The detector’s wavelength can be optimized by its design depending on the required spectral range. This is also important in the implementation of modern quantum networks[3, 12] as not just the detection efficiency of the detector, but its bandwidth is a relevant parameter.

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Figure 1: Scheme of the SNSPD with coupled optical fiber. Nanowire has thickness t𝑡titalic_t, width w𝑤witalic_w, and spacing s𝑠sitalic_s. Optical λらむだ𝜆\lambdaitalic_λらむだ/4 resonator consists of a dielectric spacer with thickness d1subscript𝑑1d_{1}italic_d start_POSTSUBSCRIPT 1 end_POSTSUBSCRIPT and a gold reflector with d2subscript𝑑2d_{2}italic_d start_POSTSUBSCRIPT 2 end_POSTSUBSCRIPT. The gap between optical fiber and nanowire is g𝑔gitalic_g. Right: Top-down view of the nanowire of diameter 2r2𝑟2r2 italic_r, with red line showing the position of the cross-sectional view.

The working principle of SNSPD is straightforward: a nanowire in the superconducting state is current-biased close to the edge of the normal metal transition. The absorption of a single photon results in the destruction of superconductivity at some place along the nanowire. Due to the current bias, the normal state region expands, which results in a voltage pulse across the nanowire. These nanowires are fabricated on 6-15 nm thick, highly disordered superconductors, such as Niobium Nitride[13], Titanium Niobium Nitride[14], Tungsten Silicide[15] and their width is in the range of 30-200 nm.

The overall system detection efficiency (SDE) of detectors is determined by the efficiency of the photon coupling to the active area of the detector ηいーたcouplingsubscript𝜂coupling\eta_{\mathrm{coupling}}italic_ηいーた start_POSTSUBSCRIPT roman_coupling end_POSTSUBSCRIPT, the photon absorption efficiency of the superconductor ηいーたabssubscript𝜂abs\eta_{\mathrm{abs}}italic_ηいーた start_POSTSUBSCRIPT roman_abs end_POSTSUBSCRIPT, and by the above-described efficiency of transformation of the absorbed photon to electric signal ηいーたintrinsicsubscript𝜂intrinsic\eta_{\mathrm{intrinsic}}italic_ηいーた start_POSTSUBSCRIPT roman_intrinsic end_POSTSUBSCRIPT and is given as[16]:

SDE=ηいーたcouplingηいーたabsηいーたintrinsic,SDEsubscript𝜂couplingsubscript𝜂abssubscript𝜂intrinsic\mathrm{SDE}=\eta_{\mathrm{coupling}}\cdot\eta_{\mathrm{abs}}\cdot\eta_{% \mathrm{intrinsic}},roman_SDE = italic_ηいーた start_POSTSUBSCRIPT roman_coupling end_POSTSUBSCRIPT ⋅ italic_ηいーた start_POSTSUBSCRIPT roman_abs end_POSTSUBSCRIPT ⋅ italic_ηいーた start_POSTSUBSCRIPT roman_intrinsic end_POSTSUBSCRIPT , (1)

The absorption of a nanowire (thin film) ηいーたabssubscript𝜂abs\eta_{\mathrm{abs}}italic_ηいーた start_POSTSUBSCRIPT roman_abs end_POSTSUBSCRIPT on bare substrate is insufficient (below 30%percent\%%, Fig. 2). To increase the absorption at the desired wavelength (λらむだ=𝜆absent\lambda=italic_λらむだ =1550 nm) the nanowires are commonly fabricated in an optical resonator, at the cost of limiting its bandwidth. A common choice is a λらむだ/4𝜆4\lambda/4italic_λらむだ / 4 resonant cavity [17].

This resonator consists of a thin dielectric layer with thickness d1subscript𝑑1d_{1}italic_d start_POSTSUBSCRIPT 1 end_POSTSUBSCRIPT, matching its optical length ΛらむだΛらむだ\Lambdaroman_Λらむだ with λらむだ/4𝜆4\lambda/4italic_λらむだ / 4 of the desired light’s wavelength. The nanowire is fabricated on one side of the dielectric and the other side is covered with a low-loss mirror metallic layer (as shown in Fig. 1). The resonator enhances the absorption of the photons in the nanowire close to 100%percent\%% (Fig. 2) by creating an antinode of the electric field of TE mode in the superconductor. The detectable light is guided by an optical fiber to this structure.

To properly model the optical properties of this structure, and thus to maximize the absorption ηいーたabssubscript𝜂abs\eta_{\mathrm{abs}}italic_ηいーた start_POSTSUBSCRIPT roman_abs end_POSTSUBSCRIPT in the nanowire, not only has the dielectric thickness d1subscript𝑑1d_{1}italic_d start_POSTSUBSCRIPT 1 end_POSTSUBSCRIPT to be optimized, but the precise optical properties of the disordered metal have to be considered. However, their optical properties in the metallic state are not trivial due to the presence of quantum corrections, which the standard Drude model fails to describe [18]. This means that, to model their optical absorption, the optical properties of the specific thin film have to be either measured in the infrared spectra, or the right optical model - or an extrapolation method - has to be chosen, if measurements in the required range are not accessible.

In this paper, we investigate the dependence of the optical absorption of NbN nanowires in λらむだ/4𝜆4\lambda/4italic_λらむだ / 4 resonant cavity on film thickness and nanowire design. The optical conductivity of a set of NbN films was determined from spectroscopic ellipsometry in the visible range, and they were fitted by the modified Drude-Lorentz model, which takes the quantum corrections into account [19] and provides an excellent fit of these conductivities. The presence of quantum corrections in the IR range results in a strong wavelength and thickness dependence of the optical properties of NbN films. The obtained optical fits and thickness dependencies of its parameters are used to model the absorption spectra of nanowires. The presented approach can be applied to other disordered films, such as MoC and NbTiN. The optical properties of the latter[20] are almost identical to the properties of NbN.

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Figure 2: Nanowire optical absorption ηいーたabssubscript𝜂abs\eta_{\mathrm{abs}}italic_ηいーた start_POSTSUBSCRIPT roman_abs end_POSTSUBSCRIPT on bare sapphire substrate and on λらむだ/4𝜆4\lambda/4italic_λらむだ / 4 resonator.

2 Optical properties of NbN films

Niobium nitride samples were deposited by means of Pulsed Laser Deposition[21] from a 99 % pure niobium target on top of single-side polished sapphire substrate in a nitrogen atmosphere with 1 % of hydrogen. The film thickness varied from 8 up to 22 nm. The optical conductivities of our films were determined from spectroscopic ellipsometry measured in wavelength range from 400 to 1000 nm at room temperature.

In Ref.[19] the quantum corrections to the optical conductivity of these NbN films were thoroughly studied. These corrections are arising from localization and interaction effects both having a square root energy dependence[22]. The optical conductivity σしぐま~=σしぐま1+iσしぐま2~𝜎subscript𝜎1𝑖subscript𝜎2\tilde{\sigma}=\sigma_{1}+i\sigma_{2}over~ start_ARG italic_σしぐま end_ARG = italic_σしぐま start_POSTSUBSCRIPT 1 end_POSTSUBSCRIPT + italic_i italic_σしぐま start_POSTSUBSCRIPT 2 end_POSTSUBSCRIPT is described by the modified Drude-Lorentz model in the form:

σしぐま1(ωおめが)=subscript𝜎1𝜔absent\displaystyle\sigma_{1}(\omega)=italic_σしぐま start_POSTSUBSCRIPT 1 end_POSTSUBSCRIPT ( italic_ωおめが ) = σしぐまD1+(ΩおめがΓがんま)2(1𝒬2(1ΩおめがΓがんま)e12(ΩおめがΓがんま)2)+limit-fromsubscript𝜎𝐷1superscriptΩおめがΓがんま21superscript𝒬21ΩおめがΓがんまsuperscript𝑒12superscriptΩおめがΓがんま2\displaystyle\frac{\sigma_{D}}{1+(\frac{\Omega}{\Gamma})^{2}}\Big{(}1-\mathcal% {Q}^{2}(1-\sqrt{\frac{\Omega}{\Gamma}})e^{-\frac{1}{2}(\frac{\Omega}{\Gamma})^% {2}}\Big{)}+divide start_ARG italic_σしぐま start_POSTSUBSCRIPT italic_D end_POSTSUBSCRIPT end_ARG start_ARG 1 + ( divide start_ARG roman_Ωおめが end_ARG start_ARG roman_Γがんま end_ARG ) start_POSTSUPERSCRIPT 2 end_POSTSUPERSCRIPT end_ARG ( 1 - caligraphic_Q start_POSTSUPERSCRIPT 2 end_POSTSUPERSCRIPT ( 1 - square-root start_ARG divide start_ARG roman_Ωおめが end_ARG start_ARG roman_Γがんま end_ARG end_ARG ) italic_e start_POSTSUPERSCRIPT - divide start_ARG 1 end_ARG start_ARG 2 end_ARG ( divide start_ARG roman_Ωおめが end_ARG start_ARG roman_Γがんま end_ARG ) start_POSTSUPERSCRIPT 2 end_POSTSUPERSCRIPT end_POSTSUPERSCRIPT ) + (2)
σしぐまL1+(ΩおめがL2Ωおめが2ΩおめがΓがんまL)2,subscript𝜎𝐿1superscriptsuperscriptsubscriptΩおめが𝐿2superscriptΩおめが2ΩおめがsubscriptΓがんま𝐿2\displaystyle\frac{\sigma_{L}}{1+\left(\frac{\Omega_{L}^{2}-\Omega^{2}}{\Omega% \Gamma_{L}}\right)^{2}},divide start_ARG italic_σしぐま start_POSTSUBSCRIPT italic_L end_POSTSUBSCRIPT end_ARG start_ARG 1 + ( divide start_ARG roman_Ωおめが start_POSTSUBSCRIPT italic_L end_POSTSUBSCRIPT start_POSTSUPERSCRIPT 2 end_POSTSUPERSCRIPT - roman_Ωおめが start_POSTSUPERSCRIPT 2 end_POSTSUPERSCRIPT end_ARG start_ARG roman_Ωおめが roman_Γがんま start_POSTSUBSCRIPT italic_L end_POSTSUBSCRIPT end_ARG ) start_POSTSUPERSCRIPT 2 end_POSTSUPERSCRIPT end_ARG ,
σしぐま2(ωおめが)=[σしぐま1(ωおめが)](εいぷしろん1)εいぷしろん0ωおめがsubscript𝜎2𝜔delimited-[]subscript𝜎1𝜔subscript𝜀1subscript𝜀0𝜔\displaystyle\sigma_{2}(\omega)=\mathcal{H}[\sigma_{1}(\omega)]-(\varepsilon_{% \infty}-1)\varepsilon_{0}\omegaitalic_σしぐま start_POSTSUBSCRIPT 2 end_POSTSUBSCRIPT ( italic_ωおめが ) = caligraphic_H [ italic_σしぐま start_POSTSUBSCRIPT 1 end_POSTSUBSCRIPT ( italic_ωおめが ) ] - ( italic_εいぷしろん start_POSTSUBSCRIPT ∞ end_POSTSUBSCRIPT - 1 ) italic_εいぷしろん start_POSTSUBSCRIPT 0 end_POSTSUBSCRIPT italic_ωおめが (3)

respectively. Here, σしぐまDsubscript𝜎𝐷\sigma_{D}italic_σしぐま start_POSTSUBSCRIPT italic_D end_POSTSUBSCRIPT is the Drude conductivity, ΓがんまΓがんま\Gammaroman_Γがんま is the electron relaxation rate and 𝒬𝒬\mathcal{Q}caligraphic_Q is the strength of the quantum corrections, also referred to as quantumness. The second term in eq. 2 describes the transition peak at ΩおめがLsubscriptΩおめが𝐿\Omega_{L}roman_Ωおめが start_POSTSUBSCRIPT italic_L end_POSTSUBSCRIPT, with strength σしぐまLsubscript𝜎𝐿\sigma_{L}italic_σしぐま start_POSTSUBSCRIPT italic_L end_POSTSUBSCRIPT, and width ΓがんまLsubscriptΓがんま𝐿\Gamma_{L}roman_Γがんま start_POSTSUBSCRIPT italic_L end_POSTSUBSCRIPT. This formula describes the anomalous suppression in the IR range and below, which is characteristic of these films. The optical conductivity for films with different thicknesses is shown in Fig.3 The same result can be represented by σしぐま1subscript𝜎1\sigma_{1}italic_σしぐま start_POSTSUBSCRIPT 1 end_POSTSUBSCRIPT vs. σしぐま2subscript𝜎2\sigma_{2}italic_σしぐま start_POSTSUBSCRIPT 2 end_POSTSUBSCRIPT plots in Fig.4, where the wavelength dependence is color-coded. The solid spirals are the fits with eqs. 2,3. The fitted parameters are listed in Tab. 1.

As can be seen in Fig. 3a, the Drude conductivity σしぐま0subscript𝜎0\sigma_{0}italic_σしぐま start_POSTSUBSCRIPT 0 end_POSTSUBSCRIPT varies weakly with thickness, but the relaxation rate ΓがんまΓがんま\Gammaroman_Γがんま and the quantumness 𝒬𝒬\mathcal{Q}caligraphic_Q are strongly thickness dependent. This reflects the commonly observed suppression of DC conductivity and, most importantly, the significant changes in the optical properties of films, especially in the IR range. By lowering the thickness, the real part of the IR range conductivity is suppressed and the imaginary part changes its sign. The dielectric function

εいぷしろんr(ωおめが)=εいぷしろん1+iεいぷしろん2=1+iσしぐま~(ωおめが)/(ϵ0ωおめが)subscript𝜀𝑟𝜔subscript𝜀1𝑖subscript𝜀21𝑖~𝜎𝜔subscriptitalic-ϵ0𝜔\varepsilon_{r}(\omega)=\varepsilon_{1}+i\varepsilon_{2}=1+i\tilde{\sigma}(% \omega)/(\epsilon_{0}\omega)italic_εいぷしろん start_POSTSUBSCRIPT italic_r end_POSTSUBSCRIPT ( italic_ωおめが ) = italic_εいぷしろん start_POSTSUBSCRIPT 1 end_POSTSUBSCRIPT + italic_i italic_εいぷしろん start_POSTSUBSCRIPT 2 end_POSTSUBSCRIPT = 1 + italic_i over~ start_ARG italic_σしぐま end_ARG ( italic_ωおめが ) / ( italic_ϵ start_POSTSUBSCRIPT 0 end_POSTSUBSCRIPT italic_ωおめが ) (4)

for various film thicknesses is plotted in Fig.3b. The known thickness dependence of these parameters allows us to conveniently model the optical properties of SNSPDs. The complex refraction index can be expressed in terms of permittivity, as:

n~=εいぷしろんr(ωおめが),~𝑛subscript𝜀𝑟𝜔\tilde{n}=\sqrt{\varepsilon_{r}(\omega)},over~ start_ARG italic_n end_ARG = square-root start_ARG italic_εいぷしろん start_POSTSUBSCRIPT italic_r end_POSTSUBSCRIPT ( italic_ωおめが ) end_ARG , (5)
d[nm]𝑑delimited-[]nmd[\textrm{nm}]italic_d [ nm ] σしぐまD[MS/m]subscript𝜎𝐷delimited-[]𝑀𝑆m\sigma_{D}[MS/\textrm{m}]italic_σしぐま start_POSTSUBSCRIPT italic_D end_POSTSUBSCRIPT [ italic_M italic_S / m ] Γがんま[eV]Planck-constant-over-2-piΓがんまdelimited-[]eV\hbar\Gamma[\textrm{eV}]roman_ℏ roman_Γがんま [ eV ] 𝒬𝒬\mathcal{Q}caligraphic_Q σしぐま1[MS/m]subscript𝜎1delimited-[]𝑀𝑆m\sigma_{1}[MS/\textrm{m}]italic_σしぐま start_POSTSUBSCRIPT 1 end_POSTSUBSCRIPT [ italic_M italic_S / m ] Γがんま1[eV]Planck-constant-over-2-pisubscriptΓがんま1delimited-[]eV\hbar\Gamma_{1}[\textrm{eV}]roman_ℏ roman_Γがんま start_POSTSUBSCRIPT 1 end_POSTSUBSCRIPT [ eV ] Ωおめが1[eV]Planck-constant-over-2-pisubscriptΩおめが1delimited-[]eV\hbar\Omega_{1}[\textrm{eV}]roman_ℏ roman_Ωおめが start_POSTSUBSCRIPT 1 end_POSTSUBSCRIPT [ eV ]
8 0.77 2.1 0.7 0.9 1.0 6.13
9 0.84 2.0 0.6 0.95 1.1 6.14
14 1.00 1.76 0.66 1.12 0.56 5.19
22 0.94 1.77 0.50 1.07 0.68 5.54
Table 1: Parameters of optical model eq.(2) obtained from the ellipsometric data fit.
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Figure 3: Specific conductivity (top) and permittivity (bottom) of thin NbN films, consisting of real (solid line) and imaginary (dashed line) parts. Thick lines are the result of spectroscopic ellipsometry measurement, and thin lines result from the model described above. Dots at zero frequency are the room temperature DC conductivities.
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Figure 4: Wavelength-dependent real and imaginary part of conductivity for films with various thicknesses. The arrows show the mismatch in the simple rescaling of the conductivities, easily visible by the change in the angle θしーた0subscript𝜃0\theta_{0}italic_θしーた start_POSTSUBSCRIPT 0 end_POSTSUBSCRIPT of arrows, which point at the conductivity at 1550 nm.

It is important to note, that not just the magnitude of the conductivity changes with the thickness, but the ratio of real to imaginary parts changes as well. This is easily visible by the change of the angle of the arrow pointing to the conductivity at λらむだ0=subscript𝜆0absent\lambda_{0}=italic_λらむだ start_POSTSUBSCRIPT 0 end_POSTSUBSCRIPT =1550 nm in Fig. 4. This angle is defined by the tangent of real and imaginary parts of the optical conductivity as tan(θしーた0)=σしぐま2(λらむだ0)/σしぐま1(λらむだ0)subscript𝜃0subscript𝜎2subscript𝜆0subscript𝜎1subscript𝜆0\tan{\theta_{0}}=\sigma_{2}(\lambda_{0})/\sigma_{1}(\lambda_{0})roman_tan ( start_ARG italic_θしーた start_POSTSUBSCRIPT 0 end_POSTSUBSCRIPT end_ARG ) = italic_σしぐま start_POSTSUBSCRIPT 2 end_POSTSUBSCRIPT ( italic_λらむだ start_POSTSUBSCRIPT 0 end_POSTSUBSCRIPT ) / italic_σしぐま start_POSTSUBSCRIPT 1 end_POSTSUBSCRIPT ( italic_λらむだ start_POSTSUBSCRIPT 0 end_POSTSUBSCRIPT ) and is a characteristic of the films for a given thickness - it does not depend on the fill factor of the nanowire, since scaling the conductivity scales both real and imaginary part.

3 Optical absorption simulations

We studied the effect of the film’s conductivity on the absorption spectra of SNSPD with a similar detector design to [14]. The numerical simulations were carried out in a commercial frequency-domain EM solver[23]. The air gap between the fiber and the surface of the detector leads to additional Fabry-Perót resonances superposing the absorption spectra of the λらむだ/4𝜆4\lambda/4italic_λらむだ / 4 resonator. This could be expressed in the wavelength dependence of the coupling parameter ηいーたcoupling(λらむだ)subscript𝜂coupling𝜆\eta_{\mathrm{coupling}}(\lambda)italic_ηいーた start_POSTSUBSCRIPT roman_coupling end_POSTSUBSCRIPT ( italic_λらむだ ). In our 2D simulations, the optical fiber output is modelled as a plane wave coupled to air and we assume infinite size of the detector in the plane perpendicular to the light propagation, which corresponds to the ideal coupling ηいーたcoupling=1subscript𝜂coupling1\eta_{\mathrm{coupling}}=1italic_ηいーた start_POSTSUBSCRIPT roman_coupling end_POSTSUBSCRIPT = 1 and allows us to focus on the absorption in the nanowire ηいーたabssubscript𝜂abs\eta_{\mathrm{abs}}italic_ηいーた start_POSTSUBSCRIPT roman_abs end_POSTSUBSCRIPT.

The optical absorption of the SNSPD can be described by the effective impedance model[24], which approximates the thin superconducting meander as a lumped element effective homogeneous medium, with effective sheet conductance G~=G1+iG2~𝐺subscript𝐺1𝑖subscript𝐺2\tilde{G}=G_{1}+iG_{2}over~ start_ARG italic_G end_ARG = italic_G start_POSTSUBSCRIPT 1 end_POSTSUBSCRIPT + italic_i italic_G start_POSTSUBSCRIPT 2 end_POSTSUBSCRIPT:

G~=σしぐま~ww+st[S/],~𝐺~𝜎𝑤𝑤𝑠𝑡delimited-[]S\tilde{G}=\tilde{\sigma}\frac{w}{w+s}t\mathrm{\ [S/\square]},over~ start_ARG italic_G end_ARG = over~ start_ARG italic_σしぐま end_ARG divide start_ARG italic_w end_ARG start_ARG italic_w + italic_s end_ARG italic_t [ roman_S / □ ] , (6)

where σしぐま~(t)~𝜎𝑡\tilde{\sigma}(t)over~ start_ARG italic_σしぐま end_ARG ( italic_t ) is the optical conductivity (in units of S/m) of the NbN film with thickness t𝑡titalic_t, and the ratio f=w/(w+s)𝑓𝑤𝑤𝑠{f={w}/{(w+s)}}italic_f = italic_w / ( italic_w + italic_s ) is the fill factor. This approximation is valid for the width and the thickness of the nanowires w,tλらむだmuch-less-than𝑤𝑡𝜆w,t\ll\lambdaitalic_w , italic_t ≪ italic_λらむだ. As these parameters are usually wsimilar-to𝑤absentw\simitalic_w ∼ 30-200 nm, tsimilar-to𝑡absentt\simitalic_t ∼ 5-22 nm, and ssimilar-to𝑠absents\simitalic_s ∼ 50-300 nm, this approximation holds well for λらむだ>1μみゅーm𝜆1𝜇m\lambda>1\mu\mathrm{m}italic_λらむだ > 1 italic_μみゅー roman_m. The validity of this approximation is demonstrated by numerical modeling of the absorption spectra of a detector with different nanowire widths and constant fill factor f=0.5𝑓0.5f=0.5italic_f = 0.5, shown in Fig. 5. The absorption spectra are almost identical for w400nmless-than-or-similar-to𝑤400nmw\lesssim 400\mathrm{nm}italic_w ≲ 400 roman_n roman_m. The negligible differences in the absorption maximum (<0.5%absentpercent0.5<0.5\%< 0.5 %) and its wavelength (<50absent50<50< 50 nm) may originate in simulation mesh discretization. The \approx 1% losses originate in the Au layer with d2=100subscript𝑑2100d_{2}=~{}100italic_d start_POSTSUBSCRIPT 2 end_POSTSUBSCRIPT = 100 nm.

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Figure 5: Simulated absorption spectra of the detector for different nanowire widths and constant fill factor f=0.5𝑓0.5f=0.5italic_f = 0.5

In Fig. 6, we present the absorption spectra of a detector with 100 nm width NbN nanowire of different thicknesses t=822𝑡822t=8-22italic_t = 8 - 22 nm on SiO2 layer with thickness d1subscript𝑑1d_{1}italic_d start_POSTSUBSCRIPT 1 end_POSTSUBSCRIPT= 250 nm. The absorption maximum corresponding to the optical length of an ideal λらむだ/4𝜆4\lambda/4italic_λらむだ / 4 resonator is 4Λらむだ=4nd116004Λらむだ4𝑛subscript𝑑116004\Lambda=4nd_{1}\approx 16004 roman_Λらむだ = 4 italic_n italic_d start_POSTSUBSCRIPT 1 end_POSTSUBSCRIPT ≈ 1600 nm. For each thickness, the fill factor f𝑓fitalic_f was tuned to maximize the absorption at λらむだ0subscript𝜆0\lambda_{0}italic_λらむだ start_POSTSUBSCRIPT 0 end_POSTSUBSCRIPT= 1550 nm. The maximal absorptions at λらむだ0subscript𝜆0\lambda_{0}italic_λらむだ start_POSTSUBSCRIPT 0 end_POSTSUBSCRIPT, and the wavelength of the absolute maximal absorption λらむだ𝜆\lambdaitalic_λらむだ are listed in Table  2. Note, that for this analysis, the optical properties of NbN films were extracted from ellipsometric measurements on films deposited on c-cut sapphire substrate. The optical properties of films deposited on different substrates, for example, SiO2 or Si3N4, can differ. However, the presented results can be easily generalized for any combination of film and dielectric material, as we will show below.

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Figure 6: Simulated absorption spectra of nanowires with different thicknesses for fill factor maximizing absorption at 1550 nm.
250 nm SiO2, 4Λらむだ=16004Λらむだ16004\Lambda=16004 roman_Λらむだ = 1600 nm
d[nm]𝑑delimited-[]nmd[\textrm{nm}]italic_d [ nm ] σしぐま2/σしぐま1subscript𝜎2subscript𝜎1\sigma_{2}/\sigma_{1}italic_σしぐま start_POSTSUBSCRIPT 2 end_POSTSUBSCRIPT / italic_σしぐま start_POSTSUBSCRIPT 1 end_POSTSUBSCRIPT @1550 nm max(ηいーたabssubscript𝜂𝑎𝑏𝑠\eta_{abs}italic_ηいーた start_POSTSUBSCRIPT italic_a italic_b italic_s end_POSTSUBSCRIPT) @1550nm@1550𝑛𝑚@1550~{}nm@ 1550 italic_n italic_m [%] fill factor λらむだmaxsubscript𝜆𝑚𝑎𝑥\lambda_{max}italic_λらむだ start_POSTSUBSCRIPT italic_m italic_a italic_x end_POSTSUBSCRIPT [nm] max (ηいーたabssubscript𝜂𝑎𝑏𝑠\eta_{abs}italic_ηいーた start_POSTSUBSCRIPT italic_a italic_b italic_s end_POSTSUBSCRIPT) [%]
8 0.025 99.1 0.6 1650 99.3
9 0.092 99.2 0.45 1550 99.2
14 0.242 96.8 0.3 1350 99.1
22 0.314 91.5 0.225 1250 97.9
Table 2: Simulated maximum absorption at 1550 nm and the optimized fill factor for 1550 nm, wavelength of maximum absorption, and maximum absorption value for different thickness

The absorption spectra for t=𝑡absentt=italic_t = 8, 9, 14, 22 nm are shown in Fig. 6. As it is visible, due to the thickness dependence of the optical conductivity (refraction index), the thickness of the film significantly shifts the position of the absorption maxima and changes the shape of the absorption spectra. The maximum of the absorption value max(ηいーたabssubscript𝜂𝑎𝑏𝑠\eta_{abs}italic_ηいーた start_POSTSUBSCRIPT italic_a italic_b italic_s end_POSTSUBSCRIPT), at its peak wavelength λらむだmaxsubscript𝜆𝑚𝑎𝑥\lambda_{max}italic_λらむだ start_POSTSUBSCRIPT italic_m italic_a italic_x end_POSTSUBSCRIPT, is also lowered for thicker films due to the increased reflection, but it is negligible compared to the drop of absorption at the desired wavelength λらむだ0subscript𝜆0\lambda_{0}italic_λらむだ start_POSTSUBSCRIPT 0 end_POSTSUBSCRIPT = 1550 nm. To study how G1subscript𝐺1G_{1}italic_G start_POSTSUBSCRIPT 1 end_POSTSUBSCRIPT and G2subscript𝐺2G_{2}italic_G start_POSTSUBSCRIPT 2 end_POSTSUBSCRIPT separately affect the absorption spectra, we simulated the absorption of the nanowire with w=100𝑤100w=100italic_w = 100 nm, s=100𝑠100s=100italic_s = 100 nm (f=0.5𝑓0.5f=0.5italic_f = 0.5), t=10𝑡10t=10italic_t = 10 nm on d1=250subscript𝑑1250d_{1}=250italic_d start_POSTSUBSCRIPT 1 end_POSTSUBSCRIPT = 250 nm SiO2 dielectric and d2=100subscript𝑑2100d_{2}=100italic_d start_POSTSUBSCRIPT 2 end_POSTSUBSCRIPT = 100 nm Au reflector.

The absorption spectra for varying G1subscript𝐺1G_{1}italic_G start_POSTSUBSCRIPT 1 end_POSTSUBSCRIPT and constant G2subscript𝐺2G_{2}italic_G start_POSTSUBSCRIPT 2 end_POSTSUBSCRIPT = 0 reveal that the real part of the effective sheet conductance G1subscript𝐺1G_{1}italic_G start_POSTSUBSCRIPT 1 end_POSTSUBSCRIPT (σしぐま1subscript𝜎1\sigma_{1}italic_σしぐま start_POSTSUBSCRIPT 1 end_POSTSUBSCRIPT, respectively) mainly affects the value of the absorption maxima, but not their position λらむだmaxsubscript𝜆𝑚𝑎𝑥\lambda_{max}italic_λらむだ start_POSTSUBSCRIPT italic_m italic_a italic_x end_POSTSUBSCRIPT, shown in Fig.7a. On the other hand, variation of G2subscript𝐺2G_{2}italic_G start_POSTSUBSCRIPT 2 end_POSTSUBSCRIPT(σしぐま2subscript𝜎2\sigma_{2}italic_σしぐま start_POSTSUBSCRIPT 2 end_POSTSUBSCRIPT, respectively) for constant G1subscript𝐺1G_{1}italic_G start_POSTSUBSCRIPT 1 end_POSTSUBSCRIPT results in the shift of absorption peak λらむだmaxsubscript𝜆𝑚𝑎𝑥\lambda_{max}italic_λらむだ start_POSTSUBSCRIPT italic_m italic_a italic_x end_POSTSUBSCRIPT, shown in Fig.7b. The simulated range of tan(θしーた)𝜃\tan{\theta}roman_tan ( start_ARG italic_θしーた end_ARG ) is approx. 0 - 0.4, which is comparable to the values of our films (0 - 0.32). Thus, the resonant absorption peak of the detector is shifted by the imaginary part of the conductance towards lower values and thus, its wavelength λらむだmaxsubscript𝜆𝑚𝑎𝑥\lambda_{max}italic_λらむだ start_POSTSUBSCRIPT italic_m italic_a italic_x end_POSTSUBSCRIPT is not solely determined by the thickness of the dielectric layer, as one could simply assume. This effect, governed by tan(θしーた)𝜃\tan{\theta}roman_tan ( start_ARG italic_θしーた end_ARG ), is universal and should be present in any thin film with similar values of tan(θしーた)𝜃\tan{\theta}roman_tan ( start_ARG italic_θしーた end_ARG ).

Refer to caption
Refer to caption
Figure 7: Optical absorption in nanowire with fixed G2=0mSsubscript𝐺20𝑚𝑆G_{2}=0\ mSitalic_G start_POSTSUBSCRIPT 2 end_POSTSUBSCRIPT = 0 italic_m italic_S (left) and varying G1subscript𝐺1G_{1}italic_G start_POSTSUBSCRIPT 1 end_POSTSUBSCRIPT, and with fixed real effective conductance G1=2.5mSsubscript𝐺12.5𝑚𝑆G_{1}=2.5\ mSitalic_G start_POSTSUBSCRIPT 1 end_POSTSUBSCRIPT = 2.5 italic_m italic_S (right).

The dependence of 1/λらむだmax1subscript𝜆𝑚𝑎𝑥1/\lambda_{max}1 / italic_λらむだ start_POSTSUBSCRIPT italic_m italic_a italic_x end_POSTSUBSCRIPT on the conductivity of the NbN films, represented by tan(θしーた)𝜃\tan{\theta}roman_tan ( start_ARG italic_θしーた end_ARG ), is linear for a broad range of tan(θしーた)𝜃\tan{\theta}roman_tan ( start_ARG italic_θしーた end_ARG ), as is visible in Fig. 8, and can be approximated as:

1λらむだmax(σしぐま2)=1λらむだmax(σしぐま2=0)+1λらむだctanθしーた,1subscript𝜆𝑚𝑎𝑥subscript𝜎21subscript𝜆𝑚𝑎𝑥subscript𝜎201subscript𝜆𝑐𝜃\frac{1}{\lambda_{max}(\sigma_{2})}={\frac{1}{\lambda_{max}(\sigma_{2}=0)}+% \frac{1}{\lambda_{c}}\tan\theta},divide start_ARG 1 end_ARG start_ARG italic_λらむだ start_POSTSUBSCRIPT italic_m italic_a italic_x end_POSTSUBSCRIPT ( italic_σしぐま start_POSTSUBSCRIPT 2 end_POSTSUBSCRIPT ) end_ARG = divide start_ARG 1 end_ARG start_ARG italic_λらむだ start_POSTSUBSCRIPT italic_m italic_a italic_x end_POSTSUBSCRIPT ( italic_σしぐま start_POSTSUBSCRIPT 2 end_POSTSUBSCRIPT = 0 ) end_ARG + divide start_ARG 1 end_ARG start_ARG italic_λらむだ start_POSTSUBSCRIPT italic_c end_POSTSUBSCRIPT end_ARG roman_tan italic_θしーた , (7)

where λらむだcsubscript𝜆𝑐\lambda_{c}italic_λらむだ start_POSTSUBSCRIPT italic_c end_POSTSUBSCRIPT is a fitting parameter. The value λらむだcsubscript𝜆𝑐\lambda_{c}italic_λらむだ start_POSTSUBSCRIPT italic_c end_POSTSUBSCRIPT is governed by the optical properties of the dielectric layer and its thickness. For the studied geometry of the detector on SiO2, λらむだc4.2similar-tosubscript𝜆𝑐4.2\lambda_{c}\sim 4.2italic_λらむだ start_POSTSUBSCRIPT italic_c end_POSTSUBSCRIPT ∼ 4.2 μみゅー𝜇\muitalic_μみゅーm. Here, we assumed tanθしーた𝜃\tan\thetaroman_tan italic_θしーた to be constant and equal to tanθしーた0subscript𝜃0\tan\theta_{0}roman_tan italic_θしーた start_POSTSUBSCRIPT 0 end_POSTSUBSCRIPT, which is a feasible approximation in the vicinity of λらむだ0subscript𝜆0\lambda_{0}italic_λらむだ start_POSTSUBSCRIPT 0 end_POSTSUBSCRIPT, as is shown in Fig. 10.

Since tan(θしーた)𝜃\tan{\theta}roman_tan ( start_ARG italic_θしーた end_ARG ) increases with decreasing wavelength, the positive feedback further lowers the resonance wavelength.

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Figure 8: Dependance of wavelengths of the simulated absorption maxima on the conductivity ratio tan(θしーた)=σしぐま2/σしぐま1=G2/G1𝜃subscript𝜎2subscript𝜎1subscript𝐺2subscript𝐺1\tan{\theta}=\sigma_{2}/\sigma_{1}=G_{2}/G_{1}roman_tan ( start_ARG italic_θしーた end_ARG ) = italic_σしぐま start_POSTSUBSCRIPT 2 end_POSTSUBSCRIPT / italic_σしぐま start_POSTSUBSCRIPT 1 end_POSTSUBSCRIPT = italic_G start_POSTSUBSCRIPT 2 end_POSTSUBSCRIPT / italic_G start_POSTSUBSCRIPT 1 end_POSTSUBSCRIPT, given by samples with different thicknesses. Left: On top of the 250nm SiO2 substrate, Right: On top of the 200 nm Si3N4 membrane

This simple relation can be directly implemented in the detector design. The absorption maximum shift due to the imaginary part of the conductivity (contribution of the thin film), for a given dielectric layer, limits the possible range of film thicknesses.

However, using e.g. a commercially available 200 nm thick Si3N4 membrane, the resonance wavelength determined by the membrane is 4Λらむだ18004Λらむだ18004\Lambda\approx 18004 roman_Λらむだ ≈ 1800 nm and the corresponding absorption at λらむだ0subscript𝜆0\lambda_{0}italic_λらむだ start_POSTSUBSCRIPT 0 end_POSTSUBSCRIPT is thus lower, as can be seen in Fig. 8. Using thicker NbN films, the resonance wavelength can be lowered and the absorption can be significantly increased, see Tab.3. For each film thickness, the fill factor was optimized to obtain the maximum absorption at λらむだ0subscript𝜆0\lambda_{0}italic_λらむだ start_POSTSUBSCRIPT 0 end_POSTSUBSCRIPT. Thus, fine-tuning the absorption peak position up to 200 nm is possible, without significant loss of total optical absorption ηいーたabssubscript𝜂𝑎𝑏𝑠\eta_{abs}italic_ηいーた start_POSTSUBSCRIPT italic_a italic_b italic_s end_POSTSUBSCRIPT.

200 nm Si3N4, 4Λらむだ=18004Λらむだ18004\Lambda=18004 roman_Λらむだ = 1800 nm
d[nm]𝑑delimited-[]nmd[\textrm{nm}]italic_d [ nm ] σしぐま2/σしぐま1subscript𝜎2subscript𝜎1\sigma_{2}/\sigma_{1}italic_σしぐま start_POSTSUBSCRIPT 2 end_POSTSUBSCRIPT / italic_σしぐま start_POSTSUBSCRIPT 1 end_POSTSUBSCRIPT @1550 nm max(ηいーたabssubscript𝜂𝑎𝑏𝑠\eta_{abs}italic_ηいーた start_POSTSUBSCRIPT italic_a italic_b italic_s end_POSTSUBSCRIPT) @1550nm@1550𝑛𝑚@1550~{}nm@ 1550 italic_n italic_m [%] fill factor λらむだmaxsubscript𝜆𝑚𝑎𝑥\lambda_{max}italic_λらむだ start_POSTSUBSCRIPT italic_m italic_a italic_x end_POSTSUBSCRIPT [nm] max (ηいーたabssubscript𝜂𝑎𝑏𝑠\eta_{abs}italic_ηいーた start_POSTSUBSCRIPT italic_a italic_b italic_s end_POSTSUBSCRIPT) [%]
8 0.025 93.3 0.65 1800 98.8
9 0.092 95.3 0.5 1750 98.7
14 0.242 98.6 0.3 1600 98.6
22 0.314 97.5 0.225 1450 98.1
Table 3: Table of sample parameters with simulated maximum absorption at 1550 nm, optimized fill factor for 1550 nm, the wavelength of maximum absorption, and maximum absorption value, respectively.

The fit parameter for the 200 nm Si3N4 membrane is λらむだc=6.3μみゅーsubscript𝜆𝑐6.3𝜇\lambda_{c}=6.3\muitalic_λらむだ start_POSTSUBSCRIPT italic_c end_POSTSUBSCRIPT = 6.3 italic_μみゅーm, estimated from the linear fit in Fig. 8.

3.1 Discussion

In similar studies, the properties of a single deposited film are often measured (for example by spectroscopic ellipsometry), and the determined specific conductivity is considered to be thickness-independent in the simulations. Consequently, the nanowire’s thickness and width are then tuned to maximize the optical absorption in the nanowire at the aimed wavelength λらむだ0subscript𝜆0\lambda_{0}italic_λらむだ start_POSTSUBSCRIPT 0 end_POSTSUBSCRIPT. For example, in Ref. [25], or Ref. [26] the same refraction index was used for samples with thicknesses ranging from 4 to 10 nm, in case of Ref. [13] even from 1 to 16 nm. Rescaling the thickness of a specific film to a requested value results in the inaccuracy of the simulated absorption. This fact is acknowledged in [24], however, no further analysis is present. Rarely, the refractive index is also considered to be wavelength independent[25].

To illustrate the error arising from this approximation, we simulated the optical absorption in the above-described nanowire for the respective conductivity σしぐま~(t)~𝜎𝑡\tilde{\sigma}(t)over~ start_ARG italic_σしぐま end_ARG ( italic_t ), and the corresponding optical indices, given by eq. 5. For example, using the conductivity of the film with tmeas=subscript𝑡𝑚𝑒𝑎𝑠absentt_{meas}=italic_t start_POSTSUBSCRIPT italic_m italic_e italic_a italic_s end_POSTSUBSCRIPT =14 nm and simply rescaling it to t=9𝑡9t=9italic_t = 9 nm for the simulation would result in a decrease of the simulated absorption maxima by approximately 200 nm, as can be seen in Fig.9.

Refer to caption
Figure 9: Simulated optical absorption of 9 nm thick sample on top of the resonant cavity. Other curves show the change in optical absorption of the optical conductivity (refraction index) taken from a sample with different thicknesses.

If one assumes the optical conductivity (refraction index) of these films to be wavelength-independent, the error in the absorption spectra will accumulate with the distance from the reference wavelength, as is shown in Fig. 10.

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Figure 10: Simulated absorption of a sample with wavelength dependent n(λらむだ)𝑛𝜆n(\lambda)italic_n ( italic_λらむだ ), constant n(λらむだ=1000,1300,1550nm)𝑛𝜆100013001550nmn(\lambda=1000,1300,1550\mathrm{nm})italic_n ( italic_λらむだ = 1000 , 1300 , 1550 roman_n roman_m ) and n𝑛nitalic_n corresponding to constant σしぐま(λらむだ=1550nm)𝜎𝜆1550nm\sigma(\lambda=1550\mathrm{nm})italic_σしぐま ( italic_λらむだ = 1550 roman_n roman_m ), respectively.

4 CONCLUSION

We modelled the absorption spectra of NbN nanowires in a λらむだ/4𝜆4\lambda/4italic_λらむだ / 4 resonator for different film thicknesses and showed that the optical conductivity of thin films significantly affects the absorption spectra. The optical conductivity of disordered metallic films is strongly affected by the presence of quantum corrections, resulting in nontrivial wavelength and thickness dependence of the optical conductivity. The real part of the conductivity determines the amplitude of absorption of the nanowire in the λらむだ/4𝜆4\lambda/4italic_λらむだ / 4 optical resonator, whereas the imaginary part contributes to the wavelength shift of the maxima. The wavelength shift of the absorption maxima can be expressed in terms of the ratio of imaginary and real parts of the optical conductivity, which is a characteristic of a film with a particular thickness. This knowledge can be utilized in detector design and optimization of its optical properties. Thus, to properly simulate and optimize the absorption of the detectors at a required wavelength, it is necessary to work with the precise optical conductivity of the particular layers. These can be obtained by direct measurements of the samples in the required range, or by utilizing a model that describes the optical conductivity of the disordered samples well, as presented in Ref. [19].

5 ACKNOWLEDGMENT

This work was supported by the Slovak Research and Development Agency under the contract APVV-20-0425, and by the project skQCI (101091548), founded by the European Union (DIGITAL) and the Recovery and Resilience Plan of the Slovak Republic.

REFERENCES

  • [1] Yu-Ao Chen, Qiang Zhang, Teng-Yun Chen, Wen-Qi Cai, Sheng-Kai Liao, Jun Zhang, Kai Chen, Juan Yin, Ji-Gang Ren, Zhu Chen, Sheng-Long Han, Qing Yu, Ken Liang, Fei Zhou, Xiao Yuan, Mei-Sheng Zhao, Tian-Yin Wang, Xiao Jiang, Liang Zhang, Wei-Yue Liu, Yang Li, Qi Shen, Yuan Cao, Chao-Yang Lu, Rong Shu, Jian-Yu Wang, Li Li, Nai-Le Liu, Feihu Xu, Xiang-Bin Wang, Cheng-Zhi Peng, and Jian-Wei Pan. An integrated space-to-ground quantum communication network over 4,600 kilometres. Nature, 589(7841):214–219, Jan 2021.
  • [2] Domenico Ribezzo, Mujtaba Zahidy, Ilaria Vagniluca, Nicola Biagi, Saverio Francesconi, Tommaso Occhipinti, Leif K. Oxenløwe, Martin Lončarić, Ivan Cvitić, Mario Stipčević, Žiga Pušavec, Rainer Kaltenbaek, Anton Ramšak, Francesco Cesa, Giorgio Giorgetti, Francesco Scazza, Angelo Bassi, Paolo De Natale, Francesco Saverio Cataliotti, Massimo Inguscio, Davide Bacco, and Alessandro Zavatta. Deploying an inter-european quantum network. Advanced Quantum Technologies, 6(2):2200061, 2023.
  • [3] Djeylan Aktas, Bruno Fedrici, Florian Kaiser, Tommaso Lunghi, Laurent Labonté, and Sébastien Tanzilli. Entanglement distribution over 150 km in wavelength division multiplexed channels for quantum cryptography. Laser & Photonics Reviews, 10(3):451–457, 2016.
  • [4] Hiroyuki Shibata, Toshimori Honjo, and Kaoru Shimizu. Quantum key distribution over a 72db channel loss using ultralow dark count superconducting single-photon detectors. Opt. Lett., 39(17):5078–5081, Sep 2014.
  • [5] G. N. Gol’tsman, O. Okunev, G. Chulkova, A. Lipatov, A. Semenov, K. Smirnov, B. Voronov, A. Dzardanov, C. Williams, and Roman Sobolewski. Picosecond superconducting single-photon optical detector. Applied Physics Letters, 79(6):705–707, 08 2001.
  • [6] Iman Esmaeil Zadeh, J. Chang, Johannes W. N. Los, Samuel Gyger, Ali W. Elshaari, Stephan Steinhauer, Sander N. Dorenbos, and Val Zwiller. Superconducting nanowire single-photon detectors: A perspective on evolution, state-of-the-art, future developments, and applications. Applied Physics Letters, 118(19):190502, 05 2021.
  • [7] D. Renker. Geiger-mode avalanche photodiodes, history, properties and problems. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 567(1):48–56, 2006. Proceedings of the 4th International Conference on New Developments in Photodetection.
  • [8] B. Cabrera, R. M. Clarke, P. Colling, A. J. Miller, S. Nam, and R. W. Romani. Detection of single infrared, optical, and ultraviolet photons using superconducting transition edge sensors. Applied Physics Letters, 73(6):735–737, 08 1998.
  • [9] Jascha A. Lau, Varun B. Verma, Dirk Schwarzer, and Alec M. Wodtke. Superconducting single-photon detectors in the mid-infrared for physical chemistry and spectroscopy. Chem. Soc. Rev., 52:921–941, 2023.
  • [10] Heqing Wang, Hao Li, Lixing You, Yong Wang, Lu Zhang, Xiaoyan Yang, Weijun Zhang, Zhen Wang, and Xiaoming Xie. Fast and high efficiency superconducting nanowire single-photon detector at 630 nm wavelength. Appl. Opt., 58(8):1868–1872, Mar 2019.
  • [11] H. Hao, QY. Zhao, and YH. et al. Huang. A compact multi-pixel superconducting nanowire single-photon detector array supporting gigabit space-to-ground communications. Light: Science & Applications, 13(1):25, Jan 2024.
  • [12] Han Chuen Lim, Akio Yoshizawa, Hidemi Tsuchida, and Kazuro Kikuchi. Wavelength-multiplexed entanglement distribution. Optical Fiber Technology, 16(4):225–235, 2010.
  • [13] WeiJun Zhang, LiXing You, Hao Li, Jia Huang, ChaoLin Lv, Lu Zhang, XiaoYu Liu, JunJie Wu, Zhen Wang, and XiaoMing Xie. Nbn superconducting nanowire single photon detector with efficiency over 90% at 1550 nm wavelength operational at compact cryocooler temperature. Science China Physics, Mechanics & Astronomy, 60(12):120314, Oct 2017.
  • [14] J. Chang, J. W. N. Los, J. O. Tenorio-Pearl, N. Noordzij, R. Gourgues, A. Guardiani, J. R. Zichi, S. F. Pereira, H. P. Urbach, V. Zwiller, S. N. Dorenbos, and I. Esmaeil Zadeh. Detecting telecom single photons with 99.5-2.07+0.5% system detection efficiency and high time resolution. APL Photonics, 6(3):036114, 03 2021.
  • [15] F. Marsili, V. B. Verma, J. A. Stern, S. Harrington, A. E. Lita, T. Gerrits, I. Vayshenker, B. Baek, M. D. Shaw, R. P. Mirin, and S. W. Nam. Detecting single infrared photons with 93% system efficiency. Nature Photonics, 7(3):210–214, March 2013.
  • [16] Lixing You. Superconducting nanowire single-photon detectors for quantum information. Nanophotonics, 9(9):2673–2692, 2020.
  • [17] L Redaelli, G Bulgarini, S Dobrovolskiy, S N Dorenbos, V Zwiller, E Monroy, and J M Gérard. Design of broadband high-efficiency superconducting-nanowire single photon detectors. Superconductor Science and Technology, 29(6):065016, may 2016.
  • [18] P. Neilinger, J. Greguš, D. Manca, B. Grančič, M. Kopčík, P. Szabó, P. Samuely, R. Hlubina, and M. Grajcar. Observation of quantum corrections to conductivity up to optical frequencies. Phys. Rev. B, 100:241106, Dec 2019.
  • [19] Samuel Kern, Pavol Neilinger, Magdaléna Poláčková, Martin Baránek, Tomáš Plecenik, Tomáš Roch, and Miroslav Grajcar. Optical and transport properties of nbn thin films revisited. arXiv preprint arXiv:2405.03704, 2024.
  • [20] Archan Banerjee, Robert M. Heath, Dmitry Morozov, Dilini Hemakumara, Umberto Nasti, Iain Thayne, and Robert H. Hadfield. Optical properties of refractory metal based thin films. Opt. Mater. Express, 8(8):2072–2088, Aug 2018.
  • [21] Serhii Volkov, Maros Gregor, Tomas Roch, Leonid Satrapinskyy, Branislav Grančič, Tomas Fiantok, and Andrej Plecenik. Superconducting properties of very high quality nbn thin films grown by pulsed laser deposition. Journal of Electrical Engineering, 70(7):89–94, 2019.
  • [22] Alex L Efros and Michael Pollak. Electron-electron interactions in disordered systems. Elsevier, 2012.
  • [23] COMSOL Multiphysics® v. 6.2. www.comsol.com. COMSOL AB, Stockholm, Sweden.
  • [24] Driessen, E. F. C., Braakman, F. R., Reiger, E. M., Dorenbos, S. N., Zwiller, V., and de Dood, M. J. A. Impedance model for the polarization-dependent optical absorption of superconducting single-photon detectors. Eur. Phys. J. Appl. Phys., 47(1):10701, 2009.
  • [25] Vikas Anant, Andrew J. Kerman, Eric A. Dauler, Joel K. W. Yang, Kristine M. Rosfjord, and Karl K. Berggren. Optical properties of superconducting nanowire single-photon detectors. Opt. Express, 16(14):10750–10761, Jul 2008.
  • [26] Taro Yamashita, Shigehito Miki, Hirotaka Terai, and Zhen Wang. Low-filling-factor superconducting single photon detector with high system detection efficiency. Opt. Express, 21(22):27177–27184, November 2013.