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Femtosecond laser induced creation of G and W-centers in silicon-on-insulator substrates
Authors:
Hugo Quard,
Mario Khoury,
Andong Wang,
Tobias Herzig,
Jan Meijer,
Sebastian Pezzagna,
Sébastien Cueff,
David Grojo,
Marco Abbarchi,
Hai Son Nguyen,
Nicolas Chauvin,
Thomas Wood
Abstract:
The creation of fluorescent defects in silicon is a key stepping stone towards assuring the integration perspectives of quantum photonic devices into existing technologies. Here we demonstrate the creation, by femtosecond laser annealing, of W and G-centers in commercial silicon on insulator (SOI) previously implanted with 12C+ ions. Their quality is comparable to that found for the same emitters…
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The creation of fluorescent defects in silicon is a key stepping stone towards assuring the integration perspectives of quantum photonic devices into existing technologies. Here we demonstrate the creation, by femtosecond laser annealing, of W and G-centers in commercial silicon on insulator (SOI) previously implanted with 12C+ ions. Their quality is comparable to that found for the same emitters obtained with conventional implant processes; as quantified by the photoluminescence radiative lifetime, the broadening of their zero-phonon line (ZPL) and the evolution of these quantities with temperature. In addition to this, we show that both defects can be created without carbon implantation and that we can erase the G-centers by annealing while enhancing the W-centers' emission. These demonstrations are relevant to the deterministic and operando generation of quantum emitters in silicon.
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Submitted 7 April, 2023;
originally announced April 2023.
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Cavity-enhanced zero-phonon emission from an ensemble of G centers in a silicon-on-insulator microring
Authors:
B. Lefaucher,
J. -B. Jager,
V. Calvo,
A. Durand,
Y. Baron,
F. Cache,
V. Jacques,
I. Robert-Philip,
G. Cassabois,
T. Herzig,
J. Meijer,
S. Pezzagna,
M. Khoury,
M. Abbarchi,
A. Dréau,
J. -M. Gérard
Abstract:
We report successful incorporation of an ensemble of G centers in silicon-on-insulator (SOI) microrings using ion implantation and conventional nanofabrication. The coupling between the emitters and the resonant modes of the microrings is studied using continuous-wave and time-resolved microphotoluminescence (PL) experiments. We observe the resonant modes of the microrings on PL spectra, on the wi…
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We report successful incorporation of an ensemble of G centers in silicon-on-insulator (SOI) microrings using ion implantation and conventional nanofabrication. The coupling between the emitters and the resonant modes of the microrings is studied using continuous-wave and time-resolved microphotoluminescence (PL) experiments. We observe the resonant modes of the microrings on PL spectra, on the wide spectral range that is covered by G centers emission. By finely tuning the size of the microrings, we match their zero-phonon line at 1278 nm with a resonant mode of quality factor around 3000 and volume 7.2 (lambda over n)^3. The zero-phonon line intensity is enhanced by a factor of 5, both in continuous-wave and time-resolved measurements. This is attributed to the Purcell enhancement of zero-phonon spontaneous emission into the resonant mode and quantitatively understood considering the distribution of the G centers dipoles. Despite the enhancement of the zero-phonon emission, we do not observe any sizeable decrease of the average lifetime of the G centers, which points at a low radiative yield (<10%). We reveal the detrimental impact of parasitic defects in heavily implanted silicon, and discuss the perspectives for quantum electrodynamics experiments with individual color centers in lightly implanted SOI rings. Our results provide key information for the development of deterministic single photon sources for integrated quantum photonics.
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Submitted 11 October, 2022;
originally announced October 2022.
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Single G centers in silicon fabricated by co-implantation with carbon and proton
Authors:
Yoann Baron,
Alrik Durand,
Tobias Herzig,
Mario Khoury,
Sébastien Pezzagna,
Jan Meijer,
Isabelle Robert-Philip,
Marco Abbarchi,
Jean-Michel Hartmann,
Shay Reboh,
Jean-Michel Gérard,
Vincent Jacques,
Guillaume Cassabois,
Anaïs Dréau
Abstract:
We report the fabrication of G centers in silicon with an areal density compatible with single photon emission at optical telecommunication wavelengths. Our sample is made from a silicon-on-insulator wafer which is locally implanted with carbon ions and protons at various fluences. Decreasing the implantation fluences enables to gradually switch from large ensembles to isolated single defects, rea…
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We report the fabrication of G centers in silicon with an areal density compatible with single photon emission at optical telecommunication wavelengths. Our sample is made from a silicon-on-insulator wafer which is locally implanted with carbon ions and protons at various fluences. Decreasing the implantation fluences enables to gradually switch from large ensembles to isolated single defects, reaching areal densities of G centers down to $\sim$0.2 $μ$m$^{-2}$. Single defect creation is demonstrated by photon antibunching in intensity-correlation experiments, thus establishing our approach as a reproducible procedure for generating single artificial atoms in silicon for quantum technologies.
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Submitted 28 April, 2022;
originally announced April 2022.
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Near-field Hyperspectral Imaging of Resonant Mie Modes in a Dielectric Island
Authors:
Nicoletta Granchi,
Michele Montanari,
Andrea Ristori,
Mario Khoury,
Mohammed Bouabdellaui,
Chiara Barri,
Luca Fagiani,
Massimo Gurioli,
Monica Bollani,
Marco Abbarchi,
Francesca Intonti
Abstract:
All-dielectric, sub-micrometric particles have been successfully exploited for light management in a plethora of applications at visible and near-infrared frequency. However, the investigation of the intricacies of the Mie resonances at the sub-wavelength scale has been hampered by the limitation of conventional near-field methods. Here we address spatial and spectral mapping of multi-polar modes…
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All-dielectric, sub-micrometric particles have been successfully exploited for light management in a plethora of applications at visible and near-infrared frequency. However, the investigation of the intricacies of the Mie resonances at the sub-wavelength scale has been hampered by the limitation of conventional near-field methods. Here we address spatial and spectral mapping of multi-polar modes of a Si island by hyper-spectral imaging. The simultaneous detection of several resonant modes allows to clarify the role of substrate and incidence angle of the impinging light, highlighting spectral splitting of the quadrupolar mode and resulting in different spatial features of the field intensity. We explore theoretically and experimentally such spatial features. Details as small as 200 nm can be detected and are in agreement with simulations based on a Finite Difference Time Domain method. Our results are relevant to near-field imaging of dielectric structures, to the comprehension of the photophysics of resonant Mie structures, to beam steering and to the resonant coupling with light emitters. Our analysis paves the way for a novel approach to control the spatial overlap of a single emitter with localized electric field maxima.
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Submitted 31 August, 2021;
originally announced August 2021.
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Detection of single W-centers in silicon
Authors:
Yoann Baron,
Alrik Durand,
Péter Udvarhelyi,
Tobias Herzig,
Mario Khoury,
Sébastien Pezzagna,
Jan Meijer,
Isabelle Robert-Philip,
Marco Abbarchi,
Jean-Michel Hartmann,
Vincent Mazzocchi,
Jean-Michel Gérard,
Adam Gali,
Vincent Jacques,
Guillaume Cassabois,
Anaïs Dréau
Abstract:
Controlling the quantum properties of individual fluorescent defects in silicon is a key challenge towards advanced quantum photonic devices prone to scalability. Research efforts have so far focused on extrinsic defects based on impurities incorporated inside the silicon lattice. Here we demonstrate the detection of single intrinsic defects in silicon, which are linked to a tri-interstitial compl…
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Controlling the quantum properties of individual fluorescent defects in silicon is a key challenge towards advanced quantum photonic devices prone to scalability. Research efforts have so far focused on extrinsic defects based on impurities incorporated inside the silicon lattice. Here we demonstrate the detection of single intrinsic defects in silicon, which are linked to a tri-interstitial complex called W-center, with a zero-phonon line at 1.218$μ$m. Investigating their single-photon emission properties reveals new information about this common radiation damage center, such as its dipolar orientation and its photophysics. We also identify its microscopic structure and show that although this defect does not feature electronic states in the bandgap, Coulomb interactions lead to excitonic radiative recombination below the silicon bandgap. These results could set the stage for numerous quantum perspectives based on intrinsic luminescent defects in silicon, such as quantum integrated photonics, quantum communications and quantum sensing.
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Submitted 28 April, 2022; v1 submitted 9 August, 2021;
originally announced August 2021.
