ルテニウム
ルテニウム(
| |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
ルテニウム, Ru, 44 | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
8, 5, d | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
101.07 | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
[Kr] 4d7 5s1 | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
2, 8, 18, 15, 1( | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
12.45 g/cm3 | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
10.65 g/cm3 | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
2607 K, 2334 °C, 4233 °F | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
4423 K, 4150 °C, 7502 °F | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
38.59 kJ/mol | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
591.6 kJ/mol | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
(25 °C) 24.06 J/(mol·K) | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
8, 7, 6, 4, 3, 2, 1,[1], -2( | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
2.3(ポーリングの | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
134 pm | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
146±7 pm | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
その | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
800℃ K | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
(0 °C) 71 n | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
(300 K) 117 W/(m⋅K) | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
(25 °C) 6.4 | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
( |
(20 °C) 5970 m/s | ||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
ヤング |
447 GPa | ||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
173 GPa | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
220 GPa | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
ポアソン |
0.30 | ||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
モース |
6.5 | ||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
ブリネル |
2160 MPa | ||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
CAS |
7440-18-8 | ||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
名称
特性
物理 的 特性
Z | ||
---|---|---|
26 | 2, 8, 14, 2 | |
44 | ルテニウム | 2, 8, 18, 15, 1 |
76 | オスミウム | 2, 8, 18, 32, 14, 2 |
108 | ハッシウム | 2, 8, 18, 32, 32, 14, 2 |
ルテニウムには
4)を
ルテニウムは、モリブデンで
0.455 V | Ru2+ + 2e− | ↔ Ru |
0.249 V | Ru3+ + e− | ↔ Ru2+ |
1.120 V | RuO2 + 4H+ + 2e− | ↔ Ru2+ + 2H2O |
1.563 V | RuO2− 4 + 8H+ + 4e− |
↔ Ru2+ + 4H2O |
1.368 V | RuO− 4 + 8H+ + 5e− |
↔ Ru2+ + 4H2O |
1.387 V | RuO4 + 4H+ + 4e− | ↔ RuO2 + 2H2O |
同位 体
15
発生
生産
ルテニウムは
ルテニウムの化合 物
ルテニウムの
酸化 物 とカルコゲン化合 物
ルテニウムは
ルテニウム
4)に
MIIRuIVO3, Na3RuVO4, Na
2RuV
2O
7, MII
2LnIII
RuV
O
6などの
ハロゲン化合 物 およびオキシハロゲン化合 物
配 位 および有機 金属 錯体
ルテニウムはさまざまな
ルテニウムは
歴史
6
ポーランドの
イェンス・ベルセリウスとGottfried Osannは1827
1844
用途
2016
ルテニウムは
ルテニウムが
ルテニウムは、
触媒
ルテニウムナノ
均一 触媒
ルテニウム
2001
2012
不 均一 触媒
ルテニウムに
新 たに出 てきている用途
いくつかのルテニウム
マイクロエレクトロニクスにおけるルテニウム薄膜 の適用
マイクロエレクトロニクスの
自然 ルテニウム
1973
脚注
- ^ “Ruthenium: ruthenium(I) fluoride compound data”. OpenMOPAC.net. 2011
年 7月 21日 時点 のオリジナルよりアーカイブ。2007年 12月 10日 閲覧 。 - ^ Magnetic susceptibility of the elements and inorganic compounds (PDF) (2004
年 3月 24日 時点 のアーカイブ), in Handbook of Chemistry and Physics 81st edition, CRC press. - ^ “イラスト
周期 表 「ルテニウム」”.愛知教育大学 科学 ・ものづくり教育 推進 センター. 2016年 1月 23日 閲覧 。 - ^ a b c d e f g Haynes, p. 4.31
- ^ Greenwood and Earnshaw, p. 1076
- ^ Greenwood and Earnshaw, p. 1078
- ^ Greenwood and Earnshaw, p. 1075
- ^ Greenwood and Earnshaw, p. 1077
- ^ a b c Lide, D. R., ed. (2005), CRC Handbook of Chemistry and Physics (86th ed.), Boca Raton (FL): CRC Press, ISBN 0-8493-0486-5 Section 11, Table of the Isotopes
- ^ a b c Audi, Georges; Bersillon, Olivier; Blachot, Jean; Wapstra, Aaldert Hendrik (2003), “The NUBASE evaluation of nuclear and decay properties”, Nuclear Physics A 729: 3–128, Bibcode: 2003NuPhA.729....3A, doi:10.1016/j.nuclphysa.2003.11.001
- ^ a b c d Emsley, J. (2003). “Ruthenium”. Nature's Building Blocks: An A-Z Guide to the Elements. Oxford, England, UK: Oxford University Press. pp. 368–370. ISBN 978-0-19-850340-8
- ^ a b Greenwood and Earnshaw, p. 1071
- ^ a b c George, Micheal W.. “2006 Minerals Yearbook: Platinum-Group Metals”. United States Geological Survey USGS. 2008
年 9月 16日 閲覧 。 - ^ a b “Commodity Report: Platinum-Group Metals”. United States Geological Survey USGS. 2008
年 9月 16日 閲覧 。 - ^ a b Loferski, Patricia J.; Ghalayini, Zachary T. and Singerling, Sheryl A. (2018) Platinum-group metals. 2016 Minerals Yearbook. USGS. p. 57.3.
- ^ Hartman, H. L.; Britton, S. G., eds (1992). SME mining engineering handbook. Littleton, Colo.: Society for Mining, Metallurgy, and Exploration. p. 69. ISBN 978-0-87335-100-3
- ^ Harris, Donald C.; Cabri, L. J. (1973). “The nomenclature of the natural alloys of osmium, iridium and ruthenium based on new compositional data of alloys from world-wide occurrences”. The Canadian Mineralogist 12 (2): 104–112 .
- ^ Greenwood and Earnshaw, p. 1074
- ^ Renner, H.; Schlamp, G.; Kleinwächter, I.; Drost, E.; Lüschow, H. M.; Tews, P.; Panster, P.; Diehl, M. et al. (2002). “Platinum group metals and compounds”. Ullmann's Encyclopedia of Industrial Chemistry. Wiley. doi:10.1002/14356007.a21_075. ISBN 978-3527306732
- ^ Seymour, R. J.; O'Farrelly, J. I. (2001). “Platinum-group metals”. Kirk Othmer Encyclopedia of Chemical Technology. Wiley. doi:10.1002/0471238961.1612012019052513.a01.pub2. ISBN 978-0471238966
- ^ Gilchrist, Raleigh (1943). “The Platinum Metals”. Chemical Reviews 32 (3): 277–372. doi:10.1021/cr60103a002.
- ^ a b c Cotton, Simon (1997). Chemistry of Precious Metals. Springer-Verlag New York, LLC. pp. 1–20. ISBN 978-0-7514-0413-5
- ^ a b Hunt, L. B.; Lever, F. M. (1969). “Platinum Metals: A Survey of Productive Resources to industrial Uses”. Platinum Metals Review 13 (4): 126–138 .
- ^ Swain, P.; Mallika, C.; Srinivasan, R.; Mudali, U. K.; Natarajan, R. (2013). “Separation and recovery of ruthenium: a review”. J. Radioanal. Nucl. Chem. 298 (2): 781–796. doi:10.1007/s10967-013-2536-5.
- ^ Greenwood, N. N.; & Earnshaw, A. (1997). Chemistry of the Elements (2nd Edn.), Oxford:Butterworth-Heinemann. ISBN 0-7506-3365-4.
- ^ a b Greenwood and Earnshaw, pp. 1080–1
- ^ a b Greenwood and Earnshaw, p. 1082
- ^ a b c Greenwood and Earnshaw, p.1083
- ^ a b Greenwood and Earnshaw, p.1084
- ^ Hartwig, J. F. (2010) Organotransition Metal Chemistry, from Bonding to Catalysis, University Science Books: New York. ISBN 1-891389-53-X
- ^ a b Weeks, Mary Elvira (1932). “The discovery of the elements. VIII. The platinum metals”. Journal of Chemical Education 9 (6): 1017. Bibcode: 1932JChEd...9.1017W. doi:10.1021/ed009p1017.
- ^ Raub, Christoph J. (2004). The Minting of Platinum Roubles. Part I: History and Current Investigations. 48. pp. 66–69 . Archive
- ^ Jędrzej Śniadecki (1808) (Polish). Rosprawa o nowym metallu w surowey platynie odkrytym. Wilno: Nakł. i Drukiem J. Zawadzkiego (Dissertation about the new metal discovered in raw platinum.)
- ^ “New Metals in the Uralian Platina”. The Philosophical Magazine 2 (11): 391–392. (1827). doi:10.1080/14786442708674516 .
- ^ a b c d e Pitchkov, V. N. (1996). “The Discovery of Ruthenium”. Platinum Metals Review 40 (4): 181–188 .
- ^ Osann, Gottfried (1829). “Berichtigung, meine Untersuchung des uralschen Platins betreffend”. Poggendorffs Annalen der Physik und Chemie 15: 158. doi:10.1002/andp.18290910119 .
- ^ Osann, Gottfried (1828). “Fortsetzung der Untersuchung des Platins vom Ural”. Poggendorffs Annalen der Physik und Chemie 14 (6): 283–297. Bibcode: 1828AnP....89..283O. doi:10.1002/andp.18280890609 . The original sentence on p. 339 reads: "Da dieses Metall, welches ich nach den so eben beschriebenen Eigenschaften als ein neues glaube annehmen zu müssen, sich in größerer Menge als das früher erwähnte in dem uralschen Platin befindet, und auch durch seinen schönen, dem Golde ähnlichen metallischen Glanz sich mehr empfiehlt, so glaube ich, daß der Vorschlag, das zuerst aufgefundene neue Metall Ruthenium zu nennen, besser auf dieses angewendet werden könne."
- ^ Claus, Karl (1845). “О способе добывания чистой платины из руд” (Russian). Горный журнал (Mining Journal) 7 (3): 157–163.
- ^ Rao, C; Trivedi, D. (2005). “Chemical and electrochemical depositions of platinum group metals and their applications”. Coordination Chemistry Reviews 249 (5–6): 613. doi:10.1016/j.ccr.2004.08.015.
- ^ Weisberg, A (1999). “Ruthenium plating”. Metal Finishing 97: 297. doi:10.1016/S0026-0576(00)83089-5.
- ^ Prepared under the direction of the ASM International Handbook Committee; Merrill L. Minges, technical chairman (1989). Electronic materials handbook. Materials Park, OH: ASM International. p. 184. ISBN 978-0-87170-285-2
- ^ Busana, M. G.; Prudenziati, M.; Hormadaly, J. (2006). “Microstructure development and electrical properties of RuO2-based lead-free thick film resistors”. Journal of Materials Science: Materials in Electronics 17 (11): 951. doi:10.1007/s10854-006-0036-x. hdl:11380/303403.
- ^ Rane, Sunit; Prudenziati, Maria; Morten, Bruno (2007). “Environment friendly perovskite ruthenate based thick film resistors”. Materials Letters 61 (2): 595. doi:10.1016/j.matlet.2006.05.015. hdl:11380/307664.
- ^ Slade, Paul G., ed (1999). Electrical contacts : principles and applications. New York, NY: Dekker. pp. 184, 345. ISBN 978-0-8247-1934-0
- ^ Schutz, R. W. (1996). “Ruthenium Enhanced Titanium Alloys”. Platinum Metals Review 40 (2): 54–61 .
- ^ “Fourth generation nickel base single crystal superalloy. TMS-138 / 138A”. High Temperature Materials Center, National Institute for Materials Science, Japan. (July 2006). オリジナルの18 April 2013
時点 におけるアーカイブ。 - ^ Koizumi, Yutaka. “Development of a Next-Generation Ni-base Single Crystal Superalloy”. Proceedings of the International Gas Turbine Congress, Tokyo 2–7 November 2003. オリジナルの10 January 2014
時点 におけるアーカイブ。 . - ^ Walston, S.; Cetel, A.; MacKay, R.; O'Hara, K.; Duhl, D.; Dreshfield, R. (December 2004). “Joint Development of a Fourth Generation Single Crystal Superalloy”. NASA
- ^ Bondarenko, Yu. A.; Kablov, E. N.; Surova, V. A.; Echin, A. B. (2006). “Effect of high-gradient directed crystallization on the structure and properties of rhenium-bearing single-crystal alloy”. Metal Science and Heat Treatment 48 (7–8): 360. Bibcode: 2006MSHT...48..360B. doi:10.1007/s11041-006-0099-6.
- ^ Mottishaw, J. (1999). “Notes from the Nib Works—Where's the Iridium?”. The PENnant XIII (2). オリジナルの4 June 2002
時点 におけるアーカイブ。 . - ^ Cardarelli, François (2008). “Dimensionally Stable Anodes (DSA) for Chlorine Evolution”. Materials Handbook: A Concise Desktop Reference. London: Springer. pp. 581–582. ISBN 978-1-84628-668-1
- ^ Varney, Mark S. (2000). “Oxygen Microoptode”. Chemical sensors in oceanography. Amsterdam: Gordon & Breach. p. 150. ISBN 978-90-5699-255-2
- ^ Hayat, M. A. (1993). “Ruthenium red”. Stains and cytochemical methods. New York, NY: Plenum Press. pp. 305–310. ISBN 978-0-306-44294-0
- ^ Wiegel, T. (1997). Radiotherapy of ocular disease, Ausgabe 13020. Basel, Freiburg: Karger. ISBN 978-3-8055-6392-5
- ^ Richards, A. D.; Rodger, A. (2007). “Synthetic metallomolecules as agents for the control of DNA structure”. Chem. Soc. Rev. 36 (3): 471–483. doi:10.1039/b609495c. PMID 17325786 .
- ^ NCJRS Abstract – National Criminal Justice Reference Service. Ncjrs.gov. Retrieved on 2017-02-28.
- ^ a b Vinokurov, Vladimir A.; Stavitskaya, Anna V.; Chudakov, Yaroslav A.; Ivanov, Evgenii V.; Shrestha, Lok Kumar; Ariga, Katsuhiko; Darrat, Yusuf A.; Lvov, Yuri M. (2017). “Formation of metal clusters in halloysite clay nanotubes”. Science and Technology of Advanced Materials 18 (1): 147–151. Bibcode: 2017STAdM..18..147V. doi:10.1080/14686996.2016.1278352. PMC 5402758. PMID 28458738 .
- ^ Delaude, Lionel and Noels, Alfred F. (2005). "Metathesis". Kirk-Othmer Encyclopedia of Chemical Technology. Kirk-Othmer Encyclopedia of Chemical Technology. Weinheim: Wiley-VCH. doi:10.1002/0471238961.metanoel.a01. ISBN 978-0471238966。
- ^ Fürstner, Alois (2000). “Olefin Metathesis and Beyond”. Angewandte Chemie International Edition 39 (17): 3012–3043. doi:10.1002/1521-3773(20000901)39:17<3012::AID-ANIE3012>3.0.CO;2-G. PMID 11028025.
- ^ Noyori, R.; Ohkuma, T.; Kitamura, M.; Takaya, H.; Sayo, N.; Kumobayashi, H.; Akutagawa, S. (1987), “Asymmetric hydrogenation of .beta.-keto carboxylic esters. A practical, purely chemical access to .beta.-hydroxy esters in high enantiomeric purity”, Journal of the American Chemical Society 109 (19): 5856, doi:10.1021/ja00253a051
- ^ Murata, Kunihiko; Okano, Kazuya; Miyagi, Miwa; Iwane, Hiroshi; Noyori, Ryoji; Ikariya, Takao (1999-10-01). “A Practical Stereoselective Synthesis of Chiral Hydrobenzoins via Asymmetric Transfer Hydrogenation of Benzils” (
英語 ). Organic Letters 1 (7): 1119–1121. doi:10.1021/ol990226a. ISSN 1523-7060 . - ^ Okano, Kazuya (2011-04-08). “Synthesis and application of chiral hydrobenzoin” (
英語 ). Tetrahedron 67 (14): 2483–2512. doi:10.1016/j.tet.2011.01.044. ISSN 0040-4020 . - ^ Ikariya, Takao; Hashiguchi, Shohei; Murata, Kunihiko and Noyori, Ryōji (2005). "Preparation of Optically Active (R,R)-Hydrobenzoin from Benzoin or Benzil". Organic Syntheses (
英語 ): 10. - ^ Chen, Fei (2015). “Synthesis of Optically Active 1,2,3,4-Tetrahydroquinolines via Asymmetric Hydrogenation Using Iridium-Diamine Catalyst”. Org. Synth. 92: 213–226. doi:10.15227/orgsyn.092.0213.
- ^ Kitano, Masaaki; Inoue, Yasunori; Yamazaki, Youhei; Hayashi, Fumitaka; Kanbara, Shinji; Matsuishi, Satoru; Yokoyama, Toshiharu; Kim, Sung-Wng et al. (2012). “Ammonia synthesis using a stable electride as an electron donor and reversible hydrogen store”. Nature Chemistry 4 (11): 934–940. Bibcode: 2012NatCh...4..934K. doi:10.1038/nchem.1476. PMID 23089869.
- ^ Schulz, Hans (1999). “Short history and present trends of Fischer–Tropsch synthesis”. Applied Catalysis A: General 186 (1–2): 3–12. doi:10.1016/S0926-860X(99)00160-X.
- ^ Kuang, Daibin; Ito, Seigo; Wenger, Bernard; Klein, Cedric; Moser, Jacques-E; Humphry-Baker, Robin; Zakeeruddin, Shaik M.; Grätzel, Michael (2006). “High Molar Extinction Coefficient Heteroleptic Ruthenium Complexes for Thin Film Dye-Sensitized Solar Cells”. Journal of the American Chemical Society 128 (12): 4146–54. doi:10.1021/ja058540p. PMID 16551124 .
- ^ Perry, R.; Kitagawa, K.; Grigera, S.; Borzi, R.; MacKenzie, A.; Ishida, K.; Maeno, Y. (2004). “Multiple First-Order Metamagnetic Transitions and Quantum Oscillations in Ultrapure Sr.3Ru2O7”. Physical Review Letters 92 (16): 166602. arXiv:cond-mat/0401371. Bibcode: 2004PhRvL..92p6602P. doi:10.1103/PhysRevLett.92.166602. PMID 15169251.
- ^ Maeno, Yoshiteru; Rice, T. Maurice; Sigrist, Manfred (2001). “The Intriguing Superconductivity of Strontium Ruthenate”. Physics Today 54 (1): 42. Bibcode: 2001PhT....54a..42M. doi:10.1063/1.1349611 .
- ^ Shlyk, Larysa; Kryukov, Sergiy; Schüpp-Niewa, Barbara; Niewa, Rainer; De Long, Lance E. (2008). “High-Temperature Ferromagnetism and Tunable Semiconductivity of (Ba, Sr)M2±xRu4∓xO11 (M = Fe, Co): A New Paradigm for Spintronics”. Advanced Materials 20 (7): 1315. doi:10.1002/adma.200701951.
- ^ Wei, P.; Desu, S. B. (1997). “Reactive ion etching of RuO2 films: the role of additive gases in O2 discharge”. Physica Status Solidi A 161 (1): 201–215. Bibcode: 1997PSSAR.161..201P. doi:10.1002/1521-396X(199705)161:1<201::AID-PSSA201>3.0.CO;2-U.
- ^ Lesaicherre, P. Y.; Yamamichi, S.; Takemura, K.; Yamaguchi, H.; Tokashiki, K.; Miyasaka, Y.; Yoshida, M.; Ono, H. (1995). “A Gbit-scale DRAM stacked capacitor with ECR MOCVD SrTiO3 over RIE patterned RuO2/TiN storage nodes”. Integrated Ferroelectrics 11 (1–4): 81–100. doi:10.1109/IEDM.1994.383296. ISBN 0-7803-2111-1.
- ^ Pan, W.; Desu, S. B. (1994). “Reactive Ion Etching of RuO2, Thin-Films Using the Gas-Mixture O2 CF3CFH2”. Journal of Vacuum Science and Technology B 12 (6): 3208–3213. Bibcode: 1994JVSTB..12.3208P. doi:10.1116/1.587501.
- ^ Vijay, D. P.; Desu, S. B.; Pan, W. (1993). “Reactive Ion Etching of Lead-Zirconate-Titanate (PZT) Thin-Film Capacitors”. Journal of the Electrochemical Society 140 (9): 2635–2639. doi:10.1149/1.2220876.
- ^ Saito, S.; Kuramasu, K. (1992). “Plasma etching of RuO2 thin films”. Japanese Journal of Applied Physics 31 (1): 135–138. Bibcode: 1992JaJAP..31..135S. doi:10.1143/JJAP.31.135.
- ^ Aoyama, T; Eguchi, K (1999). “Ruthenium films prepared by liquid source chemical vapor deposition using bis-(ethylcyclopentadienyl)ruthenium”. Japanese Journal of Applied Physics 38 (10A): 1134–6. Bibcode: 1999JaJAP..38L1134A. doi:10.1143/JJAP.38.L1134.
- ^ Iizuka, T; Arita, K; Yamamoto, I; Yamamichi, S (2001). “(Ba,Sr)TiO3 thin-film capacitors with Ru electrodes for application to ULSI processes”. NEC Research and Development 42: 64–9.
- ^ Yamamichi, S.; Lesaicherre, P.; Yamaguchi, H.; Takemura, K.; Sone, S.; Yabuta, H.; Sato, K.; Tamura, T. et al. (1997). “A stacked capacitor technology with ECR plasma MOCVD (Ba,Sr)TiO3 and RuO2/Ru/TiN/TiSix storage nodes for Gb-scale DRAM's”. IEEE Transactions on Electron Devices 44 (7): 1076–1083. Bibcode: 1997ITED...44.1076Y. doi:10.1109/16.595934.
- ^ Bandaru, J; Sands, T; Tsakalakos, L (1998). “Simple Ru electrode scheme for ferroelectric (Pb,La)(Zr,Ti)O3 capacitors directly on silicon”. Journal of Applied Physics 84 (2): 1121–1125. Bibcode: 1998JAP....84.1121B. doi:10.1063/1.368112.
- ^ Maiwa, H; Ichinose, N; Okazaki, K (1994). “Preparation and properties of Ru and RuO2 thin-film electrodes for ferroelectric thin films”. Jpn. J. Appl. Phys. 33 (9B): 5223–6. Bibcode: 1994JaJAP..33.5223M. doi:10.1143/JJAP.33.5223.
- ^ Misra, V; Lucovsky, G; Parsons, G (2002). “Issues in high-kappa gate stack interfaces”. MRS Bulletin 27 (3): 212–216. doi:10.1557/mrs2002.73.
- ^ Chan, R; Arunagiri, T. N; Zhang, Y; Chyan, O; Wallace, R. M; Kim, M. J; Hurd, T. Q (2004). “Diffusion Studies of Copper on Ruthenium Thin Film”. Electrochemical and Solid-State Letters 7 (8): G154–G157. doi:10.1149/1.1757113.
- ^ Cho, S. K; Kim, S.-K; Kim, J. J; Oh, S. M; Oh, Seung Mo (2004). “Damascene Cu electrodeposition on metal organic chemical vapor deposition-grown Ru thin film barrier”. Journal of Vacuum Science and Technology B 22 (6): 2649–2653. Bibcode: 2004JVSTB..22.2649C. doi:10.1116/1.1819911.
- ^ Chyan, O; Arunagiri, T. N; Ponnuswamy, T (2003). “Electrodeposition of Copper Thin Film on Ruthenium”. Journal of the Electrochemical Society 150 (5): C347–C350. doi:10.1149/1.1565138.
- ^ Kwon, O.-K; Kwon, S.-H; Park, H.-S; Kang, S.-W (2004). “PEALD of a Ruthenium Adhesion Layer for Copper Interconnects”. Journal of the Electrochemical Society 151 (12): C753–C756. doi:10.1149/1.1809576.
- ^ Kwon, O.-K; Kim, J.-H; Park, H.-S; Kang, S.-W (2004). “Atomic Layer Deposition of Ruthenium Thin Films for Copper Glue Layer”. Journal of the Electrochemical Society 151 (2): G109–G112. doi:10.1149/1.1640633.
- ^ Moffat, T. P.; Walker, M.; Chen, P. J.; Bonevich, J. E.; Egelhoff, W. F.; Richter, L.; Witt, C.; Aaltonen, T. et al. (2006). “Electrodeposition of Cu on Ru Barrier Layers for Damascene Processing”. Journal of the Electrochemical Society 153: C37–C50. doi:10.1149/1.2131826 .
- ^ Hayes, Brian (2002). “Terabyte Territory”. American Scientist 90 (3): 212. doi:10.1511/2002.9.3287 .
参考 文献
- 『
元素 111の新 知識 』講談社 、1998、2005、214頁 。ISBN 4-06-257192-7。 - グリーンウッド, ノーマン; アーンショウ, アラン (1997). Chemistry of the Elements (
英語 ) (2nd ed.). バターワース=ハイネマン. ISBN 978-0-08-037941-8。 - Haynes, William M., ed (2016). CRC Handbook of Chemistry and Physics (97th ed.). CRC Press. ISBN 9781498754293